Wafer Defects Inspection

 

Wafer inspection occurs intermittently throughout the manufacturing process. It provides information on the types and occurrences of the defects, and the quality of the wafer surface. This valuable information allows quick identification and resolution of potential tool problems or process issues.

 

Tool Qualification, Monitoring and Bare Wafer Inspection are common applications of wafer inspection. Advantages of wafer inspection include High Sensitivity and Real-time Defect Classification. High sensitivity is vital for advanced line width processing, the latter helps to boost throughout and efficiency of the process.